ION BEAM ANALYSIS OF THIN LAYERS   

Ion beam analysis (IBA) techniques form a group of  powerful methods to analyse the composition and thickness of thin films with thicknesses between sub-monolayer and micron(s). IBA as RBS, ERD, NRA, PIXE and PIGE provide useful additions to techniques such as SIMS, AES, SEM-EDS, FTIR, XPS, etc. The results are easy to interpret and, in contrast to the results of many other techniques, unambiguously quantifiable.

IBA is ideal to determine elemental concentration depth profiles, contaminations and thickness in terms of at/cm2 and also the film density when the thickness in nm is known.


Contact:

Wim Arnold Bik

06 26966582

info@detect99.nl


EXAMPLE  RBS

A multi-layer consisting of 4 Ag/TiO2 bilayers on a Si substrate, as measured by RBS. The table below shows the RBS outcome. 





EXAMPLE  ERD
Diffusion of H and D during annealing at 1100°C made visible with ERD: